Mems Array Underwater

Blind cave fish are capable of sensing flows and movements of nearby objects even in dark and murky water conditions with the help of arrays of pressure-gradient sensors present on their bodies called lateral-lines. To emulate this functionality of lateral-lines for autonomous underwater vehicles, an array of polymer MEMS pressure sensors have been developed that can transduce underwater

In order to get finer resolution of the underwater objects in turbid waters, it is imperative to work at MHz frequencies. A large number of transducers are required in a planar array configuration. This is possible with MEMS-based technology, which has a built-in pre-amplifier in close proximity to the sensor.

This thesis demonstrates the design, fabrication and testing of MEMS strain-gauge silicon pressure sensor arrays inspired by the fish lateral line to enable passive navigation by AUVs.

This paper develops a flexible array of LCP based MEMS pressure sensors that could be readily mounted on the streamlined surfaces of underwater vehicles. This work, through proof-of-concept experiments, demonstrates that an array of MEMS pressure sensors could be used to detect the distance and velocity of objects passing by the array.

In this work, microelectromechanical systems MEMS-based directional acoustic sensors operating in an underwater environment are explored. The studied sensors consist of a free-standing single wing or two wings pivoted to a substrate. The sensors

In future work, line and surface arrays will be designed and prepared for application with underwater micro-robotic fish, enabling obstacle imaging. Furthermore, exploring acoustic impedance matching layers and more robust encapsulation materials enhances the potential of CMUTs for marine applications.

Also, the direct simultaneous measurements from multiple sensors on the MEMS array favorably exhibit the streamwise variation of the wall-bounded flow. Generally, the MEMS sensors array-based underwater wall shear stress measurement is characterized by desirable accuracy and spatial resolution for further practical applications.

Motivation In an effort to improve the environmental awareness of maritime devices, MEMS Microelectromechanical System pressure sensor arrays based on flexible polydimethylsiloxane PDMS, liquid crystal polymer LCP and LCPPDMS substrates are being developed for use on autonomous underwater vehicles AUVs. These sensors can guide an AUV to navigate in a dark, unsteady and cluttered

2. Design and fabrication A LCP MEMS pressure sensor array of five sensors with a centre-to-centre spacing of 6 mm has been fab-ricated and packaged for underwater testing.

In this work, we present the development and experimental testing of two types of bio-inspired MEMS sensors - piezoresistive all-polymer sensors that perform steady-state flow sensing analogous to the superficial neuromasts SNs, and piezoelectric pressure sensors which perform hydrodynamic oscillatory flow sensing similar to the canal neuromasts CNs. Real-time underwater sensing