Mems Sensor Inside Vibrating Particle
A key component in a vibration monitoring application is a vibration sensor. The latest vibration sensors are based on MEMS technology using the same concept of acceleration detection in an accelerometer. The main difference is in the bandwidth of the sensor. A MEMS accelerometer has a typical bandwidth of 3 kHz, however, a vibration sensor is
Introduction. MEMS accelerometers have finally reached a point where they are able to measure vibration on a broad set of machine platforms. Recent advances in their capability, along with the many advantages that MEMS accelerometers already had over more traditional vibration sensors size, weight, cost, shock immunity, ease of use, are motivating the use of MEMS accelerometers in an
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Figure 5 provides an example of an actual MEMS vibration sensor, which samples at 20480 samples per second SPS and starts with 512-point records. In this case, the sensor only provides the magnitude information, so the total number of bins is 256 and the bin width is equal to 40 Hz 20480512. f. fBW S2
The capability of a vibration sensor to capture high-frequency signals enables more accurate frequency analysis of the vibration. The latest MEMS vibration sensor offers a bandwidth of over 6 kHz which will be discussed later. A MEMS-based vibration sensor has many use cases and Figure 1 provides a list of some major applications. Motor
MEMS sensors can provide a direct mass weighing, as opposed to reference measuring instruments, such as optical particle counters, which indirectly estimate mass 31, 32, 52. Moreover, MEMS sensors provide direct detection of particles rather than monitoring changes of parameters that could lead to the formation of particles . This allows for
What is the MEMS sensor? The term MEMS refers to micro-electro-mechanical systems. This means that MEMS are systems with components as small as 1 to 100 microns in size, and these systems can reach an average size of 20 microns to 1 millimeter. Like any integrated circuit, MEMS are manufactured with what is known as silicon wafers.
Vibration analysis is considered the best method in determining the condition of an operating object because most of the faults can be determined without stopping the object 1,2,3.This is a huge advantage over other monitoring approaches such as oil and particle analysis because in the industry, stopping the machine would cost a significant loss to the company.
One prominent example is the transportation industry, where MEMS inertial sensors are integral to vibration monitoring and speed and tilt control systems, enhancing railway stability and safety. Accelerometer sensors measure forces such as speeding up, slowing down, or vibration, while gyroscopes measure rotational motion like turning or tilting.
Figure 5 provides an example of an actual MEMS vibration sensor, which samples at 20480 samples per second SPS and starts with 512-point records. In this case, the sensor only provides the magnitude information, so the total number of bins is 256 and the bin width is equal to 40 Hz 20480512.
